- etch pits
- Смотри ямки травления.
Энциклопедический словарь по металлургии. — М.: Интермет Инжиниринг. Главный редактор Н.П. Лякишев. 2000.
Энциклопедический словарь по металлургии. — М.: Интермет Инжиниринг. Главный редактор Н.П. Лякишев. 2000.
Etch pit density — The etch pit density (EPD) is a measure for the quality of semiconductor wafers. An etch solution is applied on the surface of the wafer where the etch rate is increased at dislocations of the crystal resulting in pits. For GaAs one uses… … Wikipedia
ямки травления — [etch pits] углубления на поверхности микрошлифа после травления, образованные в местах выхода дислокаций на поверхность; используются для грубой количественной оценки плотности дислокаций преимущественно в чистых металлах. Смотри также: Ямки… … Энциклопедический словарь по металлургии
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